Title:
Development of PECVD (SiCxNy) films with a novel silane free technology ....
Development of PECVD (SiCxNy) films with a novel silane free technology ....
Author(s)
Rohatgi, Ajeet
Kang, Moon Hee
Ebong, Abasifreke
Rounsaville, Brian
Kang, Moon Hee
Ebong, Abasifreke
Rounsaville, Brian
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Abstract
Sponsor
Sixtron Advanced Materials
Date Issued
2010-12-24
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Resource Type
Text
Resource Subtype
Technical Report