Title:
Simulation, fabrication and characterization of piezoresistive bio-/chemical sensing microcantilevers

Simple item page
dc.contributor.advisor King, William P.
dc.contributor.author Goericke, Fabian Thomas en_US
dc.contributor.committeeMember Graham, Samuel
dc.contributor.committeeMember Hesketh, Peter
dc.contributor.department Mechanical Engineering en_US
dc.date.accessioned 2008-09-17T19:25:59Z
dc.date.available 2008-09-17T19:25:59Z
dc.date.issued 2007-07-05 en_US
dc.description.abstract Piezoresistive microcantilevers can be used for the detection of biological and chemical substances by measuring the change in surface stress. Design parameters for the cantilever and piezoresistor dimensions are investigated analytically and through finite element modelling. Based on these results, six optimized cantilever types are designed and fabricated with microfabrication methods. The electrical and mechanical properties of these devices as well as their deflection and surface stress sensitivities are characterized and compared to the models. A second generation of cantilevers that incorporates heater areas to trigger or enhance chemical reactions is designed and fabricated. In addition to the measurements done for the first generation devices, the thermal properties for both steady-state and transient operation of these microcantilevers are characterized. en_US
dc.description.degree M.S. en_US
dc.identifier.uri http://hdl.handle.net/1853/24624
dc.publisher Georgia Institute of Technology en_US
dc.subject Biological en_US
dc.subject Chemical en_US
dc.subject Sensor en_US
dc.subject MEMS en_US
dc.subject Cantilever en_US
dc.subject.lcsh Ion implantation
dc.subject.lcsh Microfabrication
dc.subject.lcsh Silicon Electric properties
dc.subject.lcsh Semiconductors
dc.subject.lcsh Biosensors
dc.subject.lcsh Chemical detectors
dc.subject.lcsh Microelectromechanical systems
dc.title Simulation, fabrication and characterization of piezoresistive bio-/chemical sensing microcantilevers en_US
dc.type Text
dc.type.genre Thesis
dspace.entity.type Publication
local.contributor.corporatename George W. Woodruff School of Mechanical Engineering
local.contributor.corporatename College of Engineering
relation.isOrgUnitOfPublication c01ff908-c25f-439b-bf10-a074ed886bb7
relation.isOrgUnitOfPublication 7c022d60-21d5-497c-b552-95e489a06569
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
goericke_fabian_t_200708_mast.pdf
Size:
12.45 MB
Format:
Adobe Portable Document Format
Description:
Download
Collections
Theses and Dissertations