Title:
Simulation, fabrication and characterization of piezoresistive bio-/chemical sensing microcantilevers
Simulation, fabrication and characterization of piezoresistive bio-/chemical sensing microcantilevers
Author(s)
Goericke, Fabian Thomas
Advisor(s)
King, William P.
Editor(s)
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Abstract
Piezoresistive microcantilevers can be used for the detection of biological and
chemical substances by measuring the change in surface stress. Design parameters for the
cantilever and piezoresistor dimensions are investigated analytically and through finite
element modelling. Based on these results, six optimized cantilever types are designed
and fabricated with microfabrication methods. The electrical and mechanical properties
of these devices as well as their deflection and surface stress sensitivities are
characterized and compared to the models. A second generation of cantilevers that
incorporates heater areas to trigger or enhance chemical reactions is designed and
fabricated. In addition to the measurements done for the first generation devices, the
thermal properties for both steady-state and transient operation of these microcantilevers
are characterized.
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Date Issued
2007-07-05
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Text
Resource Subtype
Thesis