Title:
Real-time monitoring and control of reactive ion etching using neural networks
Real-time monitoring and control of reactive ion etching using neural networks
Author(s)
Stokes, Charles David
Advisor(s)
May, Gary S.
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Date Issued
2000-08
Extent
241 bytes
Resource Type
Text
Resource Subtype
Dissertation
Rights Statement
Access restricted to authorized Georgia Tech users only.