Title:
Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
dc.contributor.advisor | Erbil, Ahmet | |
dc.contributor.author | Boyd, Edwin Pressley | en_US |
dc.contributor.department | Chemistry | en_US |
dc.date.accessioned | 2009-03-26T13:53:15Z | |
dc.date.available | 2009-03-26T13:53:15Z | |
dc.date.issued | 1989-12 | en_US |
dc.description.degree | M.S. | en_US |
dc.identifier.other | 330717 | en_US |
dc.identifier.uri | http://hdl.handle.net/1853/27400 | |
dc.publisher | Georgia Institute of Technology | en_US |
dc.rights | Access restricted to authorized Georgia Tech users only. | en_US |
dc.subject.lcsh | Vapor-plating | en_US |
dc.subject.lcsh | Organometallic compounds | en_US |
dc.title | Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems | en_US |
dc.type | Text | |
dc.type.genre | Thesis | |
dspace.entity.type | Publication | |
local.contributor.corporatename | School of Chemistry and Biochemistry | |
local.contributor.corporatename | College of Sciences | |
relation.isOrgUnitOfPublication | f1725b93-3ab8-4c47-a4c3-3596c03d6f1e | |
relation.isOrgUnitOfPublication | 85042be6-2d68-4e07-b384-e1f908fae48a |
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