Title:
Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems

dc.contributor.advisor Erbil, Ahmet
dc.contributor.author Boyd, Edwin Pressley en_US
dc.contributor.department Chemistry en_US
dc.date.accessioned 2009-03-26T13:53:15Z
dc.date.available 2009-03-26T13:53:15Z
dc.date.issued 1989-12 en_US
dc.description.degree M.S. en_US
dc.identifier.other 330717 en_US
dc.identifier.uri http://hdl.handle.net/1853/27400
dc.publisher Georgia Institute of Technology en_US
dc.rights Access restricted to authorized Georgia Tech users only. en_US
dc.subject.lcsh Vapor-plating en_US
dc.subject.lcsh Organometallic compounds en_US
dc.title Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems en_US
dc.type Text
dc.type.genre Thesis
dspace.entity.type Publication
local.contributor.corporatename School of Chemistry and Biochemistry
local.contributor.corporatename College of Sciences
relation.isOrgUnitOfPublication f1725b93-3ab8-4c47-a4c3-3596c03d6f1e
relation.isOrgUnitOfPublication 85042be6-2d68-4e07-b384-e1f908fae48a
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