Title:
Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
Author(s)
Boyd, Edwin Pressley
Advisor(s)
Erbil, Ahmet
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Abstract
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Date Issued
1989-12
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Text
Resource Subtype
Thesis
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Access restricted to authorized Georgia Tech users only.