Title:
Toward ultimate miniaturization of high Q silicon traveling-wave microresonators

dc.contributor.author Soltani, Mohammad en_US
dc.contributor.author Li, Qing en_US
dc.contributor.author Yegnanarayanan, Siva en_US
dc.contributor.author Adibi, Ali en_US
dc.contributor.corporatename Georgia Institute of Technology. Center for Organic Photonics and Electronics en_US
dc.contributor.corporatename Georgia Institute of Technology. School of Electrical and Computer Engineering en_US
dc.date.accessioned 2012-12-14T17:52:32Z
dc.date.available 2012-12-14T17:52:32Z
dc.date.issued 2010-09
dc.description © 2010 Optical Society of America en_US
dc.description The definitive version of this paper is available at: http://dx.doi.org/10.1364/OE.18.019541 en_US
dc.description DOI: 10.1364/OE.18.019541 en_US
dc.description.abstract High Q traveling-wave resonators (TWR)s are one of the key building block components for VLSI Photonics and photonic integrated circuits (PIC). However, dense VLSI integration requires small footprint resonators. While photonic crystal resonators have shown the record in simultaneous high Q (~10⁵-10⁶) and very small mode volumes; the structural simplicity of TWRs has motivated many ongoing researches on miniaturization of these resonators with maintaining Q in the same range. In this paper, we investigate the scaling issues of silicon traveling-wave microresonators down to ultimate miniaturization levels in SOI platforms. Two main constraints that are considered during this down scaling are: 1) Preservation of the intrinsic Q of the resonator at high values, and 2) Compatibility of resonator with passive (active) integration by preserving the SiO₂ BOX layer (plus a thin Si slab layer for P-N junction fabrication). Microdisk and microdonut (an intermediate design between disk and ring shape) are considered for high Q, miniaturization, and single-mode operation over a wide wavelength range (as high as the free-spectral range). Theoretical and experimental results for miniaturized resonators are demonstrated and Q's as high as ~10⁵ for resonators as small as 1.5 μm radius are achieved. en_US
dc.identifier.citation Soltani, Mohammad and Li, Qing and Yegnanarayanan, Siva and Adibi, Ali, "Toward ultimate miniaturization of high Q silicon traveling-wave microresonators," Optics Express, 18, 19, (September 13 2010) en_US
dc.identifier.doi 10.1364/OE.18.019541
dc.identifier.issn 1094-4087
dc.identifier.uri http://hdl.handle.net/1853/45557
dc.language.iso en_US en_US
dc.publisher Georgia Institute of Technology en_US
dc.publisher.original Optical Society of America en_US
dc.subject Integrated optics en_US
dc.subject Integrated optics devices en_US
dc.subject Optical devices en_US
dc.subject Resonators en_US
dc.title Toward ultimate miniaturization of high Q silicon traveling-wave microresonators en_US
dc.type Text
dc.type.genre Article
dspace.entity.type Publication
local.contributor.author Adibi, Ali
local.contributor.corporatename Center for Organic Photonics and Electronics
relation.isAuthorOfPublication 3f390cd1-919c-4946-af63-6f9f1e244776
relation.isOrgUnitOfPublication 43f8dc5f-0678-4f07-b44a-edbf587c338f
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
cope_330.pdf
Size:
1.9 MB
Format:
Adobe Portable Document Format
Description: