Title:
Comparison of Dielectrics and Iodine Solution for Monocrystalline and Multicrystalline Surface Passivation
Comparison of Dielectrics and Iodine Solution for Monocrystalline and Multicrystalline Surface Passivation
Author(s)
Brody, Jed
Geiger, P.
Hahn, G.
Rohatgi, Ajeet
Geiger, P.
Hahn, G.
Rohatgi, Ajeet
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Abstract
The effective lifetimes of monocrystalline and multicrystalline wafers were measured under dielectric and iodine-solution surface passivation using inductively coupled photoconductance. While all 18 spots measured
on monocrystalline materials had significantly higher (>10%) lifetimes under iodine passivation than dielectric
passivation, this condition was satisfied by only 12 of 18 spots measured on cast multicrystalline wafers and just 6 of 18 spots measured on string ribbon. Possible reasons for this behavior are discussed in this paper. Moreover, the differences in surface passivation effectiveness have also
been investigated with lifetime maps in order to overcome measurement problems related with the inhomogeneity of
ribbon silicon.
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Date Issued
2003-05
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Text
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Proceedings