Title:
Development of RIE-Textured Silicon Solar Cells

dc.contributor.author Damiani, Benjamin Mark en_US
dc.contributor.author Ludemann, R. en_US
dc.contributor.author Ruby, D. S. en_US
dc.contributor.author Zaidi, S. H. en_US
dc.contributor.author Rohatgi, Ajeet en_US
dc.contributor.corporatename Fraunhofer-Institut für Solare Energiessysteme en_US
dc.contributor.corporatename Sandia National Laboratories en_US
dc.contributor.corporatename Gratings Inc. en_US
dc.contributor.corporatename Georgia Institute of Technology. University Center of Excellence for Photovoltaic Research and Education en_US
dc.date.accessioned 2008-12-16T17:08:44Z
dc.date.available 2008-12-16T17:08:44Z
dc.date.issued 2000-09
dc.description Presented at the 28th IEEE Photovoltaic Specialists Conference; Anchorage, Alaska; September, 2000. ©2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. en_US
dc.description.abstract A maskless plasma texturing technique using Reactive Ion Etching for silicon solar cells results in a very low reflectance of 5.4 % before and 3.9 % after SiN deposition. A detailed study of surface recombination and emitter properties was made, then solar cells were fabricated using the DOSS solar cell process. Different plasma damage removal treatments are tested to optimize low lifetime solar cell efficiencies. Highest efficiencies are observed for little or no plasma-damage removal etching on mc-Si. Increased & due to the RIE texture proved superior to a single layer anti-reflection coating. This indicates that RIE texturing is a promising texturing technique, especially applicable on lower lifetime (multicrystalline) silicon. The use of non-toxic, non-corrosive SFS makes this process attractive for mass production. en_US
dc.identifier.uri http://hdl.handle.net/1853/26173
dc.language.iso en_US en_US
dc.publisher Georgia Institute of Technology en_US
dc.subject Solar cells en_US
dc.subject Silicon solar cells en_US
dc.subject Reactive Ion Etching (RIE) en_US
dc.title Development of RIE-Textured Silicon Solar Cells en_US
dc.type Text
dc.type.genre Proceedings
dspace.entity.type Publication
local.contributor.author Rohatgi, Ajeet
local.contributor.corporatename School of Electrical and Computer Engineering
local.contributor.corporatename College of Engineering
local.contributor.corporatename University Center of Excellence for Photovoltaics
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relation.isOrgUnitOfPublication 7c022d60-21d5-497c-b552-95e489a06569
relation.isOrgUnitOfPublication 93ace8d3-7479-459e-b63d-27aff6118464
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