Title:
Optical Waveguides Formed From Nano Air-gap Inter-layer Dielectric Materials And Methods Of Fabrication Thereof

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dc.contributor.patentcreator Mule', Tony
dc.contributor.patentcreator Kohl, Paul
dc.contributor.patentcreator Meindl, James D.
dc.contributor.patentcreator Padovani, Agnes
dc.contributor.patentcreator Gaylord, Thomas K.
dc.contributor.patentcreator Glytsis, Elias N.
dc.contributor.patentcreator Allen, Sue Ann B.
dc.date.accessioned 2017-05-12T14:28:07Z
dc.date.available 2017-05-12T14:28:07Z
dc.date.filed 5/10/2002
dc.date.issued 9/20/2005
dc.description.abstract Waveguides and methods of fabrication thereof are presented. A representative waveguide includes a waveguide core and a cladding layer, where the cladding layer surrounds the waveguide core. The waveguide core and cladding can be made of a host material having a plurality of nano-pores, wherein the nano-pores include a sacrificial material, and the sacrificial material can be selectively decomposed in both the core and cladding layers to form a plurality of nano air-gaps.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc G02B6/124
dc.identifier.cpc G02B6/138
dc.identifier.cpc G02B6/13
dc.identifier.patentapplicationnumber 10/142601
dc.identifier.patentnumber 6947651
dc.identifier.uri http://hdl.handle.net/1853/57592
dc.identifier.uspc 385/125
dc.title Optical Waveguides Formed From Nano Air-gap Inter-layer Dielectric Materials And Methods Of Fabrication Thereof
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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