Title:
Thermochemical Nanolithography Components, Systems, And Methods

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dc.contributor.patentcreator Riedo, Elisa
dc.contributor.patentcreator Marder, Seth R.
dc.contributor.patentcreator De Heer, Walt A.
dc.contributor.patentcreator Szoskiewicz, Robert J.
dc.contributor.patentcreator Kodali, Vamsi K.
dc.contributor.patentcreator Jones, Simon C.
dc.contributor.patentcreator Okada, Takashi
dc.contributor.patentcreator Wang, Debin
dc.contributor.patentcreator Curtis, Jennifer E.
dc.contributor.patentcreator Henderson, Clifford L.
dc.contributor.patentcreator Hua, Yueming
dc.date.accessioned 2017-05-12T14:26:02Z
dc.date.available 2017-05-12T14:26:02Z
dc.date.filed 6/1/2010
dc.date.issued 6/18/2013
dc.description.abstract Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc B82Y10/00
dc.identifier.cpc B82Y40/00
dc.identifier.cpc G03F7/0002
dc.identifier.patentapplicationnumber 12/791466
dc.identifier.patentnumber 8468611
dc.identifier.uri http://hdl.handle.net/1853/56771
dc.identifier.uspc 850/33
dc.title Thermochemical Nanolithography Components, Systems, And Methods
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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