Title:
Thermochemical Nanolithography Components, Systems, And Methods
Thermochemical Nanolithography Components, Systems, And Methods
Files
Authors
Authors
Advisors
Advisors
Associated Organizations
Organizational Unit
Series
Series
Collections
Supplementary to
Permanent Link
Abstract
Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.
Sponsor
Date Issued
6/18/2013
Extent
Resource Type
Text
Resource Subtype
Patent