Title:
Thermochemical Nanolithography Components, Systems, And Methods
Thermochemical Nanolithography Components, Systems, And Methods
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Abstract
Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.
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6/18/2013
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Patent