Title:
Highly-sensitive Displacement-measuring Optical Device

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dc.contributor.patentcreator Degertekin, Fahrettin Levent
dc.contributor.patentcreator Hall, Neal Allen
dc.contributor.patentcreator Lee, Wook
dc.date.accessioned 2017-05-12T14:28:34Z
dc.date.available 2017-05-12T14:28:34Z
dc.date.filed 4/17/2006
dc.date.issued 10/21/2008
dc.description.abstract Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and transmitting a second portion of the incident light such that the second portion of the incident light is diffracted. The device further includes a mechanical structure having a first region and a second region, the mechanical structure positioned a distance d above the diffraction grating, the second portion of the incident light is reflected off of the first region of the structure such that an interference pattern is formed by the reflected first portion and the reflected second portion of the incident light. The device can further include an electrode extending toward, but spaced a distance away from, the second region of the mechanical structure.
dc.description.assignee Georgia Tech Research Corp.
dc.identifier.cpc G01B11/02
dc.identifier.cpc G01D5/266
dc.identifier.patentapplicationnumber 11/405051
dc.identifier.patentnumber 7440117
dc.identifier.uri http://hdl.handle.net/1853/57760
dc.identifier.uspc 356/521
dc.title Highly-sensitive Displacement-measuring Optical Device
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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