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Rohatgi,
Ajeet
Rohatgi,
Ajeet
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ItemDevelopment of PECVD (SiCxNy) films with a novel silane free technology ....(Georgia Institute of Technology, 2010-12-24) Rohatgi, Ajeet ; Kang, Moon Hee ; Ebong, Abasifreke ; Rounsaville, Brian