Title:
Displacement-measuring Optical Device With Orifice

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dc.contributor.patentcreator Hall, Neal Allen
dc.contributor.patentcreator Degertekin, Fahrettin Levent
dc.date.accessioned 2017-05-12T14:28:39Z
dc.date.available 2017-05-12T14:28:39Z
dc.date.filed 4/17/2006
dc.date.issued 4/14/2009
dc.description.abstract Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and transmitting a second portion of the incident light such that the second portion of the incident light is diffracted. The device can further include a mechanical structure having a first region and a second region, the mechanical structure positioned a distance d above the diffraction grating and forming a wall of a cavity, the second portion of the incident light is reflected off of the first region of the structure such that an interference pattern is formed by the reflected first portion and the reflected second portion of the incident light. The device can further include an orifice formed in the cavity to provide for the passage of air between the inside and outside of the cavity.
dc.description.assignee Georgia Tech Research Corp.
dc.identifier.cpc G01D5/266
dc.identifier.cpc H04R23/008
dc.identifier.cpc G01B11/026
dc.identifier.patentapplicationnumber 11/405053
dc.identifier.patentnumber 7518737
dc.identifier.uri http://hdl.handle.net/1853/57793
dc.identifier.uspc 356/521
dc.title Displacement-measuring Optical Device With Orifice
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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