Title:
Tunable Piezoelectric Mems Resonators Suitable For Real-time Clock Applications

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dc.contributor.patentcreator Ayazi, Farrokh
dc.contributor.patentcreator Serrano, Diego Emilio
dc.date.accessioned 2017-05-12T14:26:01Z
dc.date.available 2017-05-12T14:26:01Z
dc.date.filed 3/31/2011
dc.date.issued 5/28/2013
dc.description.abstract A microelectromechanical resonator can include a suspended frame-shaped beam anchored at four corners thereof to a surrounding substrate along with a suspended resonator plate tethered on four sides thereof to corresponding sides of the frame-shaped beam. A pair of drive electrodes are provided on first and third diametrically opposite corners of the frame-shaped beam and a pair of sense electrodes are provided on second and fourth diametrically opposite corners of the frame-shaped beam. The resonator may also include a ground electrode on the frame-shaped beam and a piezoelectric layer sandwiched between each of the drive and sense electrodes and the ground electrode.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc H03H9/02409
dc.identifier.cpc H03H9/2463
dc.identifier.cpc H03H2009/02488
dc.identifier.patentapplicationnumber 13/077545
dc.identifier.patentnumber 8450913
dc.identifier.uri http://hdl.handle.net/1853/56765
dc.identifier.uspc 310/366
dc.title Tunable Piezoelectric Mems Resonators Suitable For Real-time Clock Applications
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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