Title:
Fabrication of avatrel pillars on Fujitsu's quartz wafers
Fabrication of avatrel pillars on Fujitsu's quartz wafers
| dc.contributor.author | Kohl, Paul A. | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. School of Chemical and Biomolecular Engineering | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. Office of Sponsored Programs | |
| dc.contributor.corporatename | Georgia Institute of Technology. Office of Sponsored Programs | |
| dc.date.accessioned | 2009-07-21T19:43:27Z | |
| dc.date.available | 2009-07-21T19:43:27Z | |
| dc.date.issued | 2009-06-05 | en_US |
| dc.description | Issued as final report | en_US |
| dc.description.sponsorship | Fujitsu Laboratories of America, Inc. | en_US |
| dc.identifier.other | 9519 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1853/29030 | |
| dc.publisher | Georgia Institute of Technology | en_US |
| dc.relation.ispartofseries | School of Chemical and Biomolecular Engineering ; Project no. E-19-ZP2 | en_US |
| dc.title | Fabrication of avatrel pillars on Fujitsu's quartz wafers | en_US |
| dc.type | Text | |
| dc.type.genre | Technical Report | |
| dspace.entity.type | Publication | |
| local.contributor.author | Kohl, Paul A. | |
| local.contributor.corporatename | School of Chemical and Biomolecular Engineering | |
| relation.isAuthorOfPublication | 59670f7f-33e1-49ed-8098-ebe05443583b | |
| relation.isOrgUnitOfPublication | 6cfa2dc6-c5bf-4f6b-99a2-57105d8f7a6f |
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