Title:
High-Q Longitudinal Block Resonators With Annexed Platforms For Mass Sensing Applications

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dc.contributor.patentcreator Hao, Zhili
dc.contributor.patentcreator Ayazi, Farrokh
dc.date.accessioned 2017-05-12T14:28:53Z
dc.date.available 2017-05-12T14:28:53Z
dc.date.filed 6/9/2006
dc.date.issued 10/26/2010
dc.description.abstract Disclosed are sensing apparatus, such as mass sensors, comprising longitudinal block resonators having annexed platforms that offer the improved mass sensitivity at micron scale, high-Q in air, simplicity of fabrication, and improved reliability. Exemplary mass sensors comprise a central block separated from a substrate. Two annexed platforms are coupled to the central block by way of two separating beams that are separated from the substrate. One or more anchors are coupled to the central block by way of support beams that are separated from the substrate by insulating material. One or more transducers are provided for actuating and sensing vibration of the central block and the annexed platforms. The transducers may employ capacitive and piezoelectric drive and sense schemes.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc G01H11/08
dc.identifier.patentapplicationnumber 11/450186
dc.identifier.patentnumber 7819011
dc.identifier.uri http://hdl.handle.net/1853/57895
dc.identifier.uspc 73/649
dc.title High-Q Longitudinal Block Resonators With Annexed Platforms For Mass Sensing Applications
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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