Force Sensing Integrated Readout And Active Tip Based Probe Microscope Systems

dc.contributor.patentcreator Degertekin, Fahrettin Levent
dc.date.accessioned 2017-05-12T14:28:40Z
dc.date.available 2017-05-12T14:28:40Z
dc.date.filed 4/6/2006
dc.date.issued 6/30/2009
dc.description.abstract In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc B82Y35/00
dc.identifier.cpc G01Q20/02
dc.identifier.cpc G01Q20/04
dc.identifier.patentapplicationnumber 11/398650
dc.identifier.patentnumber 7552625
dc.identifier.uri http://hdl.handle.net/1853/57803
dc.identifier.uspc 73/105
dc.title Force Sensing Integrated Readout And Active Tip Based Probe Microscope Systems
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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