Title:
Force Sensing Integrated Readout And Active Tip Based Probe Microscope Systems
Force Sensing Integrated Readout And Active Tip Based Probe Microscope Systems
| dc.contributor.patentcreator | Degertekin, Fahrettin Levent | |
| dc.date.accessioned | 2017-05-12T14:28:40Z | |
| dc.date.available | 2017-05-12T14:28:40Z | |
| dc.date.filed | 4/6/2006 | |
| dc.date.issued | 6/30/2009 | |
| dc.description.abstract | In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance. | |
| dc.description.assignee | Georgia Tech Research Corporation | |
| dc.identifier.cpc | B82Y35/00 | |
| dc.identifier.cpc | G01Q20/02 | |
| dc.identifier.cpc | G01Q20/04 | |
| dc.identifier.patentapplicationnumber | 11/398650 | |
| dc.identifier.patentnumber | 7552625 | |
| dc.identifier.uri | http://hdl.handle.net/1853/57803 | |
| dc.identifier.uspc | 73/105 | |
| dc.title | Force Sensing Integrated Readout And Active Tip Based Probe Microscope Systems | |
| dc.type | Text | |
| dc.type.genre | Patent | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Georgia Institute of Technology | |
| local.relation.ispartofseries | Georgia Tech Patents | |
| relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
| relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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