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Pressure Sensing Devices with Improved Force Threshold

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Abstract
A sensing device includes a pressure sensor and a deformable cover. A fluid cavity engineered between the deformable cover and the pressure sensor changes shape and ultimately collapses as force is applied to the sensing device. The shape and collapse of the engineered cavity, along with the entire structure of deformable cover and the pressure sensor, govern the force vs. pressure behavior of the sensing device and can be tailored as desired. A first benefit includes providing tailored properties of the sensing device by varying the structure of the deformable cover. A second benefit includes that if too much force is applied, excess force—beyond that which is required to collapse the engineered cavity—does not produce excess pressure which would cause damage to the pressure sensor. As such the sensing device is protected from accidental, or intended, over loading.
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Date Issued
10/5/2021
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