Title:
Processes For Producing Low Cost, High Efficiency Silicon Solar Cells
Processes For Producing Low Cost, High Efficiency Silicon Solar Cells
| dc.contributor.patentcreator | Rohatgi, Ajeet | |
| dc.contributor.patentcreator | Chen, Zhizhang | |
| dc.contributor.patentcreator | Doshi, Parag | |
| dc.date.accessioned | 2017-05-12T14:27:14Z | |
| dc.date.available | 2017-05-12T14:27:14Z | |
| dc.date.filed | 9/9/1994 | |
| dc.date.issued | 4/23/1996 | |
| dc.description.abstract | Processes which utilize rapid thermal processing (RTP) are provided for inexpensively producing high efficiency silicon solar cells. The RTP processes preserve minority carrier bulk lifetime τ and permit selective adjustment of the depth of the diffused regions, including emitter and back surface field (bsf), within the silicon substrate. Silicon solar cell efficiencies of 16.9% have been achieved. In a first RTP process, an RTP step is utilized to simultaneously diffuse phosphorus and aluminum into the front and back surfaces, respectively, of a silicon substrate. Moreover, an in situ controlled cooling procedure preserves the carrier bulk lifetime τ and permits selective adjustment of the depth of the diffused regions. In a second RTP process, both simultaneous diffusion of the phosphorus and aluminum as well as annealing of the front and back contacts are accomplished during the RTP step. In a third RTP process, the RTP step accomplishes simultaneous diffusion of the phosphorus and aluminum, annealing of the contacts, and annealing of a double-layer antireflection/passivation coating SiN/SiOx. | |
| dc.description.assignee | Georgia Tech Research Corporation | |
| dc.identifier.cpc | H01L31/02168 | |
| dc.identifier.cpc | H01L31/022425 | |
| dc.identifier.cpc | H01L31/1804 | |
| dc.identifier.patentapplicationnumber | 08/303340 | |
| dc.identifier.patentnumber | 5510271 | |
| dc.identifier.uri | http://hdl.handle.net/1853/57212 | |
| dc.identifier.uspc | 438/57 | |
| dc.title | Processes For Producing Low Cost, High Efficiency Silicon Solar Cells | |
| dc.type | Text | |
| dc.type.genre | Patent | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Georgia Institute of Technology | |
| local.relation.ispartofseries | Georgia Tech Patents | |
| relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
| relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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