Title:
Piezoelectric-on-semiconductor Micromechanical Resonators With Linear Acoustic Bandgap Tethers

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dc.contributor.patentcreator Ayazi, Farrokh
dc.contributor.patentcreator Sorenson, Logan
dc.contributor.patentcreator Fu, Jenna
dc.date.accessioned 2017-05-12T14:26:14Z
dc.date.available 2017-05-12T14:26:14Z
dc.date.filed 7/30/2011
dc.date.issued 1/7/2014
dc.description.abstract Microelectromechanical resonators include a resonator body anchored to a substrate by at least one tether containing a coupled-ring linear acoustic bandgap structure therein. The coupled-ring linear acoustic bandgap structure can include a plurality of piezoelectric-on-semiconductor rings connected together by a plurality of piezoelectric-on-semiconductor tether segments. A first electrode may also be provided, which extends on the resonator body and the coupled-ring linear acoustic bandgap structure. This resonator body, which may be suspended opposite a recess in the substrate, may include a semiconductor (e.g., silicon) body having a piezoelectric layer (e.g., AlN) thereon, which extends between the semiconductor body and the first electrode. The coupled-ring linear acoustic bandgap structure may be a periodic structure, where a pitch between each of the plurality of piezoelectric-on-semiconductor rings in the at least one tether is equivalent, or a non-periodic structure.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc H03H9/02338
dc.identifier.cpc H03H9/02228
dc.identifier.cpc H03H2009/155
dc.identifier.patentapplicationnumber 13/194921
dc.identifier.patentnumber 8624471
dc.identifier.uri http://hdl.handle.net/1853/56841
dc.identifier.uspc 310/351
dc.title Piezoelectric-on-semiconductor Micromechanical Resonators With Linear Acoustic Bandgap Tethers
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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