Title:
Effects of abrasive waterjet erosion on single crystal silicon

dc.contributor.advisor Danyluk, Steven
dc.contributor.author Lauque, Olivier en_US
dc.contributor.department Mechanical engineering en_US
dc.date.accessioned 2007-09-26T14:46:32Z
dc.date.available 2007-09-26T14:46:32Z
dc.date.issued 1998-12 en_US
dc.description.degree M.S. en_US
dc.identifier.bibid 484770 en_US
dc.identifier.uri http://hdl.handle.net/1853/16782
dc.publisher Georgia Institute of Technology en_US
dc.rights Access restricted to authorized Georgia Tech users only. en_US
dc.subject.lcsh Water jet cutting en_US
dc.subject.lcsh Crystal growth en_US
dc.title Effects of abrasive waterjet erosion on single crystal silicon en_US
dc.type Text
dc.type.genre Thesis
dspace.entity.type Publication
local.contributor.advisor Danyluk, Steven
local.contributor.corporatename George W. Woodruff School of Mechanical Engineering
local.contributor.corporatename College of Engineering
relation.isAdvisorOfPublication 87cdff3a-1d95-4b3b-97f3-fa686905084b
relation.isOrgUnitOfPublication c01ff908-c25f-439b-bf10-a074ed886bb7
relation.isOrgUnitOfPublication 7c022d60-21d5-497c-b552-95e489a06569
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