Title:
Micro-electromechanical Switched Tunable Inductor

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dc.contributor.patentcreator Ayazi, Farrokh
dc.contributor.patentcreator Raieszadeh, Mina
dc.contributor.patentcreator Kohl, Paul A.
dc.date.accessioned 2017-05-12T14:28:55Z
dc.date.available 2017-05-12T14:28:55Z
dc.date.filed 12/6/2007
dc.date.issued 12/7/2010
dc.description.abstract Disclosed is an integrated tunable inductor having mutual micromachined inductances fabricated in close proximity to a tunable inductor that is switched in and out by micromechanical ohmic switches to change the inductance of the integrated tunable inductor. To achieve a large tuning range and high quality factor, silver is preferably used as the structural material to co-fabricate the inductors and micromachined switches, and silicon is selectively removed from the backside of the substrate. Using this method, exemplary tuning of 47% at 6 GHz is achievable for a 1.1 nH silver inductor fabricated on a low-loss polymer membrane. The effect of the quality factor on the tuning characteristic of the integrated inductor is evaluated by comparing the measured result of substantially identical inductors fabricated on various substrates. To maintain the quality factor of the silver inductor, the device may be encapsulated using a low-cost wafer-level polymer packaging technique.
dc.description.assignee Georgia Tech Research Corporation
dc.identifier.cpc H01F17/0006
dc.identifier.cpc H01F21/12
dc.identifier.cpc H01F27/022
dc.identifier.patentapplicationnumber 11/999527
dc.identifier.patentnumber 7847669
dc.identifier.uri http://hdl.handle.net/1853/57911
dc.identifier.uspc 336/200
dc.title Micro-electromechanical Switched Tunable Inductor
dc.type Text
dc.type.genre Patent
dspace.entity.type Publication
local.contributor.corporatename Georgia Institute of Technology
local.relation.ispartofseries Georgia Tech Patents
relation.isOrgUnitOfPublication cc30e153-7a64-4ae2-9b1d-5436686785e3
relation.isSeriesOfPublication 0f49c79d-4efb-4bd9-b060-5c7f9191b9da
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