Title:
Micro-electromechanical Resonators Having Electrically-trimmed Resonator Bodies Therein And Methods Of Fabricating Same Using Joule Heating
Micro-electromechanical Resonators Having Electrically-trimmed Resonator Bodies Therein And Methods Of Fabricating Same Using Joule Heating
| dc.contributor.patentcreator | Ayazi, Farrokh | |
| dc.contributor.patentcreator | Samarao, Ashwin | |
| dc.date.accessioned | 2017-05-12T14:29:09Z | |
| dc.date.available | 2017-05-12T14:29:09Z | |
| dc.date.filed | 8/3/2009 | |
| dc.date.issued | 11/22/2011 | |
| dc.description.abstract | A micro-electromechanical resonator includes an electrically-trimmed resonator body having at least one stiffness-enhanced semiconductor region therein containing metal-semiconductor lattice bonds. These metal-semiconductor lattice bonds may be gold-silicon lattice bonds and/or aluminum-silicon lattice bonds. A surface of the resonator body is mass-loaded with the metal, which may be provided by a plurality of spaced-apart metal islands. These metal islands may be aligned along a longitudinal axis of the resonator body. A size of the at least one stiffness-enhanced polycrystalline semiconductor region may be sufficient to yield an increase in resonant frequency of the resonator body relative to an otherwise equivalent resonator having a single crystal resonator body that is free of mass-loading by the metal. | |
| dc.description.assignee | Georgia Tech Research Corporation | |
| dc.identifier.cpc | H03H9/02275 | |
| dc.identifier.cpc | H03H9/02401 | |
| dc.identifier.cpc | H03H9/02433 | |
| dc.identifier.patentapplicationnumber | 12/534401 | |
| dc.identifier.patentnumber | 8061013 | |
| dc.identifier.uri | http://hdl.handle.net/1853/58006 | |
| dc.identifier.uspc | 29/592.1 | |
| dc.title | Micro-electromechanical Resonators Having Electrically-trimmed Resonator Bodies Therein And Methods Of Fabricating Same Using Joule Heating | |
| dc.type | Text | |
| dc.type.genre | Patent | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Georgia Institute of Technology | |
| local.relation.ispartofseries | Georgia Tech Patents | |
| relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
| relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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