Title:
Pitch/Roll Annulus Gyroscope with Slanted Quadrature Tuning Electrodes and Related Fabrication Methods
Pitch/Roll Annulus Gyroscope with Slanted Quadrature Tuning Electrodes and Related Fabrication Methods
| dc.contributor.patentcreator | Wen, Haoran | |
| dc.contributor.patentcreator | Ayazi, Farrokh | |
| dc.contributor.patentcreator | Daruwalla, Anosh | |
| dc.date.accessioned | 2022-07-08T14:21:43Z | |
| dc.date.available | 2022-07-08T14:21:43Z | |
| dc.date.filed | 6/7/2017 | |
| dc.date.issued | 2/16/2021 | |
| dc.description.abstract | A bulk acoustic wave resonator apparatus includes a resonator member having an annulus shape, and at least one anchor structure coupling the resonator member to a substrate. A perimeter of the resonator member is at least partially defined by respective sidewalls that are slanted at an angle relative to a plane defined by a surface of the resonator member. The surface of the resonator member may be defined by a (100) crystal plane, and the angle of the respective sidewalls may be defined by a (111) crystal plane. Related fabrication methods are also discussed. | |
| dc.description.assignee | Georgia Tech Research Corporation | |
| dc.identifier.cpc | G01C 19/5698 | |
| dc.identifier.cpc | H03H 3/007 | |
| dc.identifier.cpc | H03H 3/0072 | |
| dc.identifier.patentapplicationnumber | US 16/307,169 | |
| dc.identifier.patentnumber | 10921123 | |
| dc.identifier.uri | http://hdl.handle.net/1853/67070 | |
| dc.title | Pitch/Roll Annulus Gyroscope with Slanted Quadrature Tuning Electrodes and Related Fabrication Methods | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Georgia Institute of Technology | |
| local.relation.ispartofseries | Georgia Tech Patents | |
| relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
| relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
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