Title:
Novel probe structures for high-speed atomic force microscopy

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dc.contributor.advisor Degertekin, F. Levent
dc.contributor.author Hadizadeh, Rameen en_US
dc.contributor.committeeMember Leamy, Michael
dc.contributor.committeeMember Sulchek, Todd
dc.contributor.department Mechanical Engineering en_US
dc.date.accessioned 2011-03-04T20:22:52Z
dc.date.available 2011-03-04T20:22:52Z
dc.date.issued 2009-08-24 en_US
dc.description.abstract Atomic Force Microscopy (AFM) has become an indispensable metrology tool for nanoscale surface characterization. Today, research and industry demand faster and more accurate metrology and these demands must be met expediently. Traditional AFM cantilevers and associated actuators (i.e. piezoelectric) are limited in regards to actuation speed and resonance frequency presenting the user with an undesired trade-off of speed versus resolution. Based on a pre-existing technology known as the FIRAT (Force Sensing Integrated Readout and Active Tip) AFM probe, this work aims to remedy actuation and response issues by implementing a cantilever-on-cantilever probe as well as a novel seesaw probe. Both cases implement electrostatic actuation, eliminating the need for piezoelectrics while demonstrating large - micron scale - actuation and sensitive displacement detection. These new probe designs can potentially demonstrate a wide bandwidth frequency response (e.g. 100 kHz) ideal for high-speed video-rate imaging. Unlike traditional AFM cantilevers, this is realized by mechanically coupling two physically separate structures to provide a soft resonator sensor atop a stiff actuator structure. Common surface-micromachining techniques are utilized to solve the logistical challenge of fabricating these stacked structures. By manipulating the viscous damping and mechanical mode coupling it becomes feasible to attain the aforementioned desired dynamic characteristics. en_US
dc.description.degree M.S. en_US
dc.identifier.uri http://hdl.handle.net/1853/37203
dc.publisher Georgia Institute of Technology en_US
dc.subject FIRAT en_US
dc.subject Electrostatic en_US
dc.subject Seesaw en_US
dc.subject Atomic force en_US
dc.subject High speed en_US
dc.subject Dual cantilever en_US
dc.subject.lcsh Atomic force microscopy
dc.subject.lcsh Probes (Electronic instruments)
dc.title Novel probe structures for high-speed atomic force microscopy en_US
dc.type Text
dc.type.genre Thesis
dspace.entity.type Publication
local.contributor.advisor Degertekin, F. Levent
local.contributor.corporatename George W. Woodruff School of Mechanical Engineering
local.contributor.corporatename College of Engineering
relation.isAdvisorOfPublication 9afd92fe-bb98-4c83-b8ac-fc596320991a
relation.isOrgUnitOfPublication c01ff908-c25f-439b-bf10-a074ed886bb7
relation.isOrgUnitOfPublication 7c022d60-21d5-497c-b552-95e489a06569
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