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Hunt,
William D.
Hunt,
William D.
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ItemA new method for wideband characterization of resonator-based sensing platforms(Georgia Institute of Technology, 2011-03) Munir, Farasat ; Wathen, Adam ; Hunt, William D.A new approach to the electronic instrumentation for extracting data from resonator-based sensing devices (e.g., microelectromechanical, piezoelectric, electrochemical, and acoustic) is suggested and demonstrated here. Traditionally, oscillator-based circuitry is employed to monitor shift in the resonance frequency of the resonator. These circuits give a single point measurement at the frequency where the oscillation criterion is met. However, the resonator response itself is broadband and contains much more information than a single point measurement. Here, we present a method for the broadband characterization of a resonator using white noise as an excitation signal. The resonator is used in a two-port filter configuration, and the resonator output is subjected to frequency spectrum analysis. The result is a wideband spectral map analogous to the magnitude of the S21 parameters of a conventional filter. Compared to other sources for broadband excitation (e.g., frequency chirp, multisine, or narrow time domain pulse), the white noise source requires no design of the input signal and is readily available for very wide bandwidths (1 MHz–3 GHz). Moreover, it offers simplicity in circuit design as it does not require precise impedance matching; whereas such requirements are very strict for oscillator-based circuit systems, and can be difficult to fulfill. This results in a measurement system that does not require calibration, which is a significant advantage over oscillator circuits. Simulation results are first presented for verification of the proposed system, followed by measurement results with a prototype implementation. A 434 MHz surface acoustic wave (SAW) resonator and a 5 MHz quartz crystal microbalance (QCM) are measured using the proposed method, and the results are compared to measurements taken by a conventional bench-top network analyzer. Maximum relative differences in the measured resonance frequencies of the SAW and QCM resonators are 0.0004% and 0.002%, respectively. The ability to track a changing sensor response is demonstrated by inducing temperature variations and measuring resonance frequency simultaneously using the proposed technique in parallel with a network analyzer. The relative difference between the two measurements is about 5.53 ppm, highlighting the impressive accuracy of the proposed system. Using commercially available digital signal processors (DSPs), we believe that this technique can be implemented as a system-on-a-chip solution resulting in a very low cost, easy to use, portable, and customizable sensing system. In addition, given the simplicity of the signal and circuit design, and its immunity to other common interface concerns (injection locking, oscillator interference, and drift, etc.), this method is better suited to accommodating array-based systems.
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ItemTrapped hybrid modes in solidly mounted resonators based on c-axis oriented hexagonal crystals(Georgia Institute of Technology, 2010-12) Wathen, Adam D. ; Munir, Farasat ; Hunt, William D.Assuming an idealized piezoelectric bulk acoustic wave resonator, one typically calculates the velocity of the fundamental bulk acoustic mode as the measured frequency times twice the thickness of the piezoelectric film. In c-axis 6mm hexagonal crystals of (e.g., ZnO or AlN), both the longitudinal and thickness shear modes are peizoelectrically active using thickness excitation and lateral-field excitation, respectively. Without a loss of generality, we concentrate our study on ZnO films. The theoretical velocity of the pure thickness shear mode in sputtered ZnO, based strictly on reported material properties, is calculated to be approximately 2580 m/s. However, a variety of acoustic velocities for the thickness shear mode in ZnO have been reported in the literature ranging from about 3100–3500 m/s. These reported values represent a 20%–36% increase in acoustic velocity relative to the theoretical values. In the literature, this deviation is typically attributed to ZnO film inconsistencies and other phenomena which can be difficult to quantify. We propose that the reported inconsistencies may be attributed to a hybrid acoustic mode comprised of a coupling of shear and longitudinal particle displacements. In this paper, we present a theoretical description of a hybrid mode in ZnO solidly mounted resonator (SMR) devices. We begin first with an experimental verification of a mode with a changing velocity in a ZnO SMR with the only variable being the ZnO thickness. Using the acoustic velocity through the thickness as an effective velocity with which to reference the mode, we find the effective acoustic velocity to range from 3100–3900 m/s, with increasing ZnO thickness. We then start from the first principles of piezoelectric acoustic wave propagation and derive three coupled partial differential equations describing a hybrid mode comprised of the coupling between longitudinal and shear particle displacement and the corresponding piezoelectrically generated potential in the ZnO film. The qualitative findings described by the derived equations are then further investigated with finite element simulation (COMSOL MULTIPHYSICS®). We simulate the performance of our experimental devices using the COMSOL platform, examine the eigenfrequencies of the structure, and find a hybrid mode which is trapped both vertically and laterally in the ZnO film. Calculating the effective velocity of the simulated modes, we find the simulated effective velocities to be within 1.5% of our measured results. Finally, we compare simulation results to experimentally measured results of a previously observed hybrid mode and achieve a 0.2% agreement.