(Georgia Institute of Technology, 2009-06)
Naeli, Kianoush; Brand, Oliver
novel technique is developed to cancel the effect of environmental parameters, e.g., temperature and humidity, in resonant mass sensing. Utilizing a single resonator, the environmental cancellation is achieved by monitoring a pair of resonant overtones and the effective sensed mass in those overtones. As an eminent advantage, especially compared to dual-mode temperature compensation techniques, the presented technique eliminates any need for previously measured look-up tables or fitting the measurement data. We show that a resonant cantilever beam is an appropriate platform for applying this technique, and derive an analytical expression to relate the actual and effective sensed masses on a cantilever beam. Thereby, it is shown that in applying the presented technique successfully, the effective sensed masses must not be the same in the investigated pair of resonance overtones. To prove the feasibility of the proposed technique, flexural resonance frequencies of a silicon cantilever are measured before and after loading with a strip of photoresist. Applying the presented technique shows significant reductions in influence of environmental parameters, with the temperature and humidity coefficients of frequency being improved from −19.5 to 0.2 ppm °C⁻¹ and from 0.7 to −0.03 ppm %RH⁻¹, respectively.
(Georgia Institute of Technology, 2009-01)
Naeli, Kianoush; Brand, Oliver
This work aims to provide guidelines for designing rectangular silicon cantilever beams to achieve maximum quality factors for the fundamental flexural resonance at atmospheric pressure. The methodology of this work is based on experimental data acquisition of resonance characteristics of silicon cantilevers, combined with modification of analytical damping models to match the captured data. For this purpose, rectangular silicon cantilever beams with thicknesses of 5, 7, 8, 11, and 17 µ m and lengths and widths ranging from 70 to 1050 µ m and 80 to 230 µ m, respectively, have been fabricated and tested. Combining the three dominant damping mechanisms, i.e., the air damping, support loss, and thermoelastic damping, the variation in the measured Q-factors with the cantilever geometrical dimensions is predicted. Also to better describe the experimental data, modified models for air damping have been developed. These modified models can predict the optimum length and thickness of a resonant cantilever to achieve the maximum quality factor at the fundamental flexural resonance mode in air.