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Brand,
Oliver
Brand,
Oliver
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ItemResonant MEMS(Georgia Institute of Technology, 2015-12-08) Brand, OliverThe presentation discusses resonant MEMS and, in particular, resonant microsensors, in which the measurand affects a characteristic of the resonance behavior of a microstructure, such as its resonance frequency or quality factor. The seminar will cover the theoretical background of resonant MEMS and discuss different ways of how the measurand can interact with the resonance characteristics of a MEMS structure. The resonant MEMS concepts will be explained using a number of examples, including chemical sensors and magnetic field sensors.