(Georgia Institute of Technology, 2015-12-08)
Brand, Oliver
The presentation discusses resonant MEMS and, in
particular, resonant microsensors, in which the measurand affects a characteristic of the resonance behavior of a
microstructure, such as its resonance frequency or quality factor. The seminar will cover the theoretical background of
resonant MEMS and discuss different ways of how the measurand can interact with the resonance characteristics of a
MEMS structure. The resonant MEMS concepts will be explained using a number of examples, including chemical
sensors and magnetic field sensors.