Title:
Porous Gas Sensors And Method Of Preparation Thereof
Porous Gas Sensors And Method Of Preparation Thereof
Files
Authors
Authors
Advisors
Advisors
Associated Organizations
Organizational Unit
Series
Series
Collections
Supplementary to
Permanent Link
Abstract
A sensor is disclosed. A representative sensor includes a silicon substrate having a porous silicon region. A portion of the porous silicon region has a front contact is disposed thereon. The contact resistance between the porous silicon region and the front contact is between about 10 ohms and 100 ohms.
Sponsor
Date Issued
11/23/2010
Extent
Resource Type
Text
Resource Subtype
Patent