Title:
Compliant Wafer-level Packaging Devices And Methods Of Fabrication
Compliant Wafer-level Packaging Devices And Methods Of Fabrication
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Abstract
Devices and method of fabrication thereof are disclosed. A representative device includes one or more lead packages. The lead packages include a substrate including a plurality of die pads, an overcoat polymer layer, a plurality of sacrificial polymer layers disposed between the substrate and the overcoat polymer layer, and a plurality of leads. Each lead is disposed upon the overcoat polymer layer having a first portion disposed upon a die pad. The sacrificial polymer layer can be removed to form one or more air-gaps.
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Date Issued
2/10/2004
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Patent