Title:
Using interdigitated electrodes for measuring photoacid generator kinetics in chemically amplified resists
Using interdigitated electrodes for measuring photoacid generator kinetics in chemically amplified resists
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Berger, C.M.
Byers, J.D.
Henderson, Clifford L.
Byers, J.D.
Henderson, Clifford L.
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Abstract
In this work, the feasibility of using interdigitated electrodes to measure the kinetics of photoacid generation in a resist film has been examined. Interdigitated electrodes provide a quick, noninvasive, nondestructive alternative to traditional Dill C measurement techniques and unlike traditional techniques is easily performed in a wafer fab environment. The initial results indicate that
the interdigitated electrodes ~IDEs! used in this work are capable of both detecting the small quantities of acid generated by photoacid generators ~PAGs! at loadings typical of those found in chemically amplified resists and quantifying the amount of acid generated during exposure. In addition, a linear relationship has been observed between measured IDE capacitance and both PAG and photoacid content. This relationship has been utilized to determine the Dill C parameter from the measured IDE capacitance response vs. exposure dose for films consisting of triphenylsulfonium triflate ~TPS-Tf! in a poly~hydroxystyrene! ~PHOST! Matrix. A Dill C value of 0.0445 cm2/mJ was measured for TPS-Tf in PHOST, which is in agreement with literature values for similar PAG-polymer systems.
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2004-02
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