Title:
Thermal conduction from microcantilever heaters in partial vacuum

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Lee, Jung Chul
Wright, Tanya L.
Abel, Mark R.
Sunden, Erik Oscar
Marchenkov, Alexei
Graham, Samuel
King, William P.
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Abstract
This paper reports the thermal and electrical characteristics of a heated microcantilever in air and helium over a wide range of pressures. The cantilever heater size modulates thermal conductance between the cantilever and its gaseous surroundings; and the Knudsen number, Kn characterizes this thermal conductance. When Kn<1, thermal transport from the cantilever heater depends on gas pressure, and when Kn>1, thermal transport from the cantilever heater remains constant. This measurement of thermal conductance around Kn = 1 could aid the design and analysis of Pirani sensors and other microscale thermal sensors and actuators.
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2007-01-01
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