Title:
Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths
Systematic design and fabrication of high-Q single-mode pulley-coupled planar silicon nitride microdisk resonators at visible wavelengths
Files
Author(s)
Hosseini, Ehsan Shah
Yegnanarayanan, Siva
Atabaki, Amir Hossein
Soltani, Mohammad
Adibi, Ali
Yegnanarayanan, Siva
Atabaki, Amir Hossein
Soltani, Mohammad
Adibi, Ali
Advisor(s)
Editor(s)
Collections
Supplementary to
Permanent Link
Abstract
High quality (Q ≈ 6 × 10⁵) microdisk resonators are demonstrated in a Si₃N₄ on SiO₂platform at 652–660 nm with integrated in-plane wrap-around coupling waveguides to enable critical coupling to specific microdisk radial modes. Selective coupling to the first three radial modes with >20dB suppression of the other radial modes is achieved by controlling the wrap-around waveguide width. Advantages of such pulley-coupled microdisk resonators include single mode operation, ease of fabrication due to larger waveguide-resonator gaps, the possibility of resist reflow during the lithography phase to improve microdisk etched surface quality, and the ability to realize highly over-coupled microdisks suitable for low-loss delay lines and add-drop filters.
Sponsor
Date Issued
2010-02
Extent
Resource Type
Text
Resource Subtype
Article