Acoustics in nanotechnology: manipulation, device application and modeling

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Buchine, Brent Alan
Wang, Zhong Lin
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Advancing the field of nanotechnology to incorporate the unique properties observed at the nanoscale into functional devices has become a major scientific thrust of the 21st century. New fabrication tools and assembly techniques are required to design and manufacture devices based on one-dimensional nanostructures. Three techniques for manipulating nanomaterials post-synthesis have been developed. Two of them involve direct contact manipulation through the utilization of a physical probe. The third uses optically generated surface acoustic waves to reproducibly control and assemble one-dimensional nanostructures into desired locations. The nature of the third technique is non-contact and limits contamination and defects from being introduced into a device by manipulation. While the effective manipulation of individual nanostructures into device components is important for building functional nanosystems, commercialization is limited by this one-device-at-a-time process. A new approach to nanostructure synthesis was also developed to site-specifically nucleate and grow nanowires between two electrodes. Integrating synthesis directly with prefabricated device architectures leads to the possible mass production of NEMS, MEMS and CMOS systems based upon one-dimensional nanomaterials. The above processes have been pursued to utilize piezoelectric ZnO nanobelts for applications in high frequency electronic filtering as well as biological and chemical sensing. The high quality, single crystal, faceted nature of these materials make them ideal candidates for studying their properties through the designs of a bulk acoustic resonator. The first ever piezoelectric bulk acoustic resonator based on bottom-up synthesized belts will be demonstrated. Initial results are promising and new designs are implemented to scale the device to sub-micron dimensions. Multiple models will be developed to assist with design and testing. Some of models presented will help verify experimental results while others will demonstrate some of the problems plaguing further investigations.
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