Title:
Plasma assisted deposition of low dielectric constant fluorocarbon materials for microelectronic applications

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Author(s)
Agraharam, Sairam
Authors
Advisor(s)
Hess, Dennis W.
Kohl, Paul A.
Allen, Sue Ann Bidstrup
Advisor(s)
Editor(s)
Associated Organization(s)
Series
Supplementary to
Abstract
Sponsor
Date Issued
2000-08
Extent
241 bytes
Resource Type
Text
Resource Subtype
Dissertation
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