Title:
Photosensitive Polyimide Composition And Polyimide Precursor Composition
Photosensitive Polyimide Composition And Polyimide Precursor Composition
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Abstract
There is provided a photosensitive composition including a polyimide or polyimide precursor. The polyimide and polyimide precursor of the present invention includes a group of a first acid-cleavable group, a first base-cleavable group or a first thermally-cleavable group, and another group of a hydrophilic group, or a protected hydrophilic group by a second acid-cleavable group, a second base-cleavable group, or a crosslinkable group.
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12/14/2010
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Patent