High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range

High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range

Files

cope_332.pdf (1.3 MB)

Author(s)

Hosseini, Ehsan Shah

Yegnanarayanan, Siva

Atabaki, Amir Hossein

Soltani, Mohammad

Associated Organization(s)

Organizational Unit

Center for Organic Photonics and Electronics

Collections

Research Publications

Permanent Link

http://hdl.handle.net/1853/45558

Abstract

High quality factor (Q≈3.4×10⁶) microdisk resonators are demonstrated in a Si3N4 on SiO₂ platform at 652–660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si3N4 layer at the air-substrate interface to improve the coupling.

Date

2009-08

Resource Type

Text

Resource Subtype

Article