Title:
High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range

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Hosseini, Ehsan Shah
Yegnanarayanan, Siva
Atabaki, Amir Hossein
Soltani, Mohammad
Adibi, Ali
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Abstract
High quality factor (Q≈3.4×10⁶) microdisk resonators are demonstrated in a Si3N4 on SiO₂ platform at 652–660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si3N4 layer at the air-substrate interface to improve the coupling.
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2009-08
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