Title:
Chemical Vapor Deposition Of Transistion Metals
Chemical Vapor Deposition Of Transistion Metals
| dc.contributor.patentcreator | Erbil, Ahmet | |
| dc.date.accessioned | 2017-05-12T14:26:12Z | |
| dc.date.available | 2017-05-12T14:26:12Z | |
| dc.date.filed | 6/22/1988 | |
| dc.date.issued | 2/12/1991 | |
| dc.description.abstract | Coatings of Group IIA metals and compounds thereof are formed by chemical vapor deposition, in which a heat decomposable organometallic compound of the formula (I) wherein M is a transition metal of Group VB, VIB, VIIB or VIII, R₁ is a lower alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, R₂ is a hydrogen or lower alkyl or alkenyl radical, n is the valence of M and is an integer from 2 to 4, and p is an integer from 0 to (n-1), is contacted with a heated substrate which is above the decomposition temperature of the organometallic compound. The pure metal is obtained when the compound of the formula I is the sole heat decomposable compound present and deposition is carried out under nonoxidizing conditions. Intermetallic compounds such as manganese telluride can be deposited from a manganese compound of formula I and a heat decomposable tellurium compound under nonoxidizing conditions. | |
| dc.description.assignee | Georgia Tech Research Corporation | |
| dc.identifier.cpc | C07F9/00 | |
| dc.identifier.cpc | C23C16/18 | |
| dc.identifier.cpc | C07F17/00 | |
| dc.identifier.patentapplicationnumber | 07/210079 | |
| dc.identifier.patentnumber | 4992305 | |
| dc.identifier.uri | http://hdl.handle.net/1853/56831 | |
| dc.identifier.uspc | 427/252 | |
| dc.title | Chemical Vapor Deposition Of Transistion Metals | |
| dc.type | Text | |
| dc.type.genre | Patent | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Georgia Institute of Technology | |
| local.relation.ispartofseries | Georgia Tech Patents | |
| relation.isOrgUnitOfPublication | cc30e153-7a64-4ae2-9b1d-5436686785e3 | |
| relation.isSeriesOfPublication | 0f49c79d-4efb-4bd9-b060-5c7f9191b9da |
Files
Original bundle
1 - 1 of 1