Title:
Production and Analysis of Polymeric Microcantilever Parts
Production and Analysis of Polymeric Microcantilever Parts
dc.contributor.advisor | Colton, Jonathan S. | |
dc.contributor.author | McFarland, Andrew W. | en_US |
dc.contributor.committeeMember | Bottomley, Lawrence | |
dc.contributor.committeeMember | Degertekin, F Levent | |
dc.contributor.committeeMember | McDowell, David | |
dc.contributor.committeeMember | Muzzy, John | |
dc.contributor.committeeMember | Smith, Marc | |
dc.contributor.department | Mechanical Engineering | en_US |
dc.date.accessioned | 2005-03-01T19:40:02Z | |
dc.date.available | 2005-03-01T19:40:02Z | |
dc.date.issued | 2004-11-24 | en_US |
dc.description.abstract | This dissertation presents work involving the manufacture and analytic modeling of microcantilever parts (length-width-thickness of roughly 500-100-10 microns). The manufacturing goals were to devise a means for and demonstrate repeatable production of microcantilevers from techniques not used in the integrated-circuit field, which are the exclusive means of current microcantilever production. The production of microcantilevers was achieved via a solvent casting approach and with injection molding, which produced parts from various thermoplastic polymeric materials (amorphous, semi-crystalline, fiber- and nanoclay-filled) in a repeatable fashion. Limits of the injection molding process in terms of the thinnest cantilevers possible were examined with 2 microns being the lower bound. Subsets of the injection-molded parts were used in a variety of sensing applications, some results were successful (e.g., vapor-phase, resonance- and deflection-based sensing), while others showed poor results, likely due to experimental shortcomings (e.g., fluid-phase, deflection-based sensing). Additionally, microcantilever parts with integrated tips were injection-molded and showed to function at the same level as commercial, tipped, silicon-nitride parts when imaging an optical grating; this experimental work was the first demonstration of injection-molded parts for chemical sensing and force spectroscopy. The scientific results were (i) the derivation of a length scale dependent bending stiffness and experimental evidence showing that such an effect was observed, (ii) the development of a new microcantilever experimental mode (surface stress monitoring via microcantilever bending resonant frequencies) and experimental validation of the technique, and (iii) a new method for determining microcantilever geometry based upon measurement of a bending, lateral, and torsional mode and experimental validation of the procedure. | en_US |
dc.description.degree | Ph.D. | en_US |
dc.format.extent | 10024923 bytes | |
dc.format.mimetype | application/pdf | |
dc.identifier.uri | http://hdl.handle.net/1853/4895 | |
dc.language.iso | en_US | |
dc.publisher | Georgia Institute of Technology | en_US |
dc.subject | MEMS | en_US |
dc.subject | Microcantilever | |
dc.subject | Micromolding | |
dc.subject.lcsh | Plastics Molding | en_US |
dc.subject.lcsh | Microelectromechanical systems Materials | en_US |
dc.subject.lcsh | Injection molding of plastics | en_US |
dc.title | Production and Analysis of Polymeric Microcantilever Parts | en_US |
dc.type | Text | |
dc.type.genre | Dissertation | |
dspace.entity.type | Publication | |
local.contributor.advisor | Colton, Jonathan S. | |
local.contributor.corporatename | George W. Woodruff School of Mechanical Engineering | |
local.contributor.corporatename | College of Engineering | |
relation.isAdvisorOfPublication | a1d2f2ce-a503-4dc2-a3bf-46e5c7ef4f40 | |
relation.isOrgUnitOfPublication | c01ff908-c25f-439b-bf10-a074ed886bb7 | |
relation.isOrgUnitOfPublication | 7c022d60-21d5-497c-b552-95e489a06569 |
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