A Novel Fabrication Method for Producing Arrays of Nanopores in Ultra-thin Membranes
Author(s)
Ahmadi, Amir G.
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Abstract
Functional nanopores are of great interest to sensing applications in the scientific community A novel method is demonstrated here
for producing arrays of nanopores of size 10-100 nm on silicon wafers with high yield (~900 per wafer) and reproducibility. The
method combines electron beam lithography (EBL) and atomic layer deposition (ALD) and allows the size of the pores to be fine
tuned to nanometer resolution.
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Date
2010-12-07
Extent
21:01 minutes
Resource Type
Moving Image
Resource Subtype
Lecture