Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications

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barstow_sean_j_200312_phd.pdf (8.98 MB)
Author(s)
Barstow, Sean J.
Advisor(s)
Henderson, Clifford L.
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School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
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Theses and Dissertations
Supplementary to:
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http://hdl.handle.net/1853/5385
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Date
2003-12-01
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9416623 bytes
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Resource Subtype
Dissertation
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