Title:
Development of improved photosensitive polycarbonate systems for the fabrication of microfluidic devices
Development of improved photosensitive polycarbonate systems for the fabrication of microfluidic devices
| dc.contributor.author | White, Celesta E. | |
| dc.contributor.author | Henderson, Clifford L. | |
| dc.contributor.corporatename | Georgia Institute of Technology. Center for Organic Photonics and Electronics | en_US |
| dc.contributor.corporatename | Georgia Institute of Technology. School of Chemical and Biomolecular Engineering | en_US |
| dc.date.accessioned | 2013-04-18T19:11:22Z | |
| dc.date.available | 2013-04-18T19:11:22Z | |
| dc.date.issued | 2003-11 | |
| dc.description | © 2003 American Vacuum Society. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Vacuum Society. The electronic version of this article is the complete one and can be found at: http://dx.doi.org/10.1116/1.1622934 | en_US |
| dc.description | DOI: 10.1116/1.1622934 | |
| dc.description.abstract | A technique was recently developed for the fabrication of microfluidic devices that involves using thermally sacrificial polymeric materials in conjunction with other conventional microelectronic processes. This method provides more versatility and choice for construction materials than other current techniques, and it enables the integration of higher levels of functionality into microfluidic systems (i.e., fully integrated multilevel fluidic systems with functional valves, pumping systems, other microelectromechanical system components, and microelectronic devices). This article describes recent results related to the development of photodefinable polycarbonates with improved properties for thermally sacrificial polymer applications. Results of the synthesis and characterization of a polycarbonate that can be directly patterned with the use of photoacid generators via acid-catalyzed thermolysis of polycarbonates are presented. | en_US |
| dc.embargo.terms | null | en_US |
| dc.identifier.citation | White, Celesta E. and Henderson, Clifford L., "Development of improved photosensitive polycarbonate systems for the fabrication of microfluidic devices," Journal of Vacuum Science & Technology B, Vol. 21, no.6, pp.2926-2930 (November 2003). | en_US |
| dc.identifier.doi | 10.1116/1.1622934 | |
| dc.identifier.issn | 0734-211X (print) | |
| dc.identifier.uri | http://hdl.handle.net/1853/46802 | |
| dc.language.iso | en_US | en_US |
| dc.publisher | Georgia Institute of Technology | en_US |
| dc.publisher.original | American Vacuum Society | |
| dc.subject | Microfluidics | en_US |
| dc.subject | Optical polymers | en_US |
| dc.subject | Polymerization | en_US |
| dc.title | Development of improved photosensitive polycarbonate systems for the fabrication of microfluidic devices | en_US |
| dc.type | Text | |
| dc.type.genre | Article | |
| dspace.entity.type | Publication | |
| local.contributor.corporatename | Center for Organic Photonics and Electronics | |
| relation.isOrgUnitOfPublication | 43f8dc5f-0678-4f07-b44a-edbf587c338f |