Sacrificial Compositions, Methods Of Use Thereof, And Methods Of Decomposition Thereof
Author(s)
Advisor(s)
Editor(s)
Collections
Supplementary to:
Permanent Link
Abstract
Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a composition having a sacrificial polymer and a photoacid generator.
Sponsor
Date
5/30/2006
Extent
Resource Type
Text
Resource Subtype
Patent