Temperature compensation method for resonant microsensors based on a controlled stiffness modulation

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Seo, Jae Hyeong
Demirci, Kemal Safak
Byun, Albert
Truax, Stuart
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http://hdl.handle.net/1853/45543
Abstract
A strategy to compensate for frequency drifts caused by temperature changes in resonant microstructures is presented. The proposed compensation method is based on a controlled stiffness modulation of the resonator by an additional feedback loop to extract the frequency changes caused by temperature changes. The feasibility of the suggested method is verified experimentally by compensating for temperature-induced frequency fluctuations of a micromachined resonator. The developed compensation scheme requires only one additional feedback loop and is applicable to any resonant microstructure featuring excitation and detection elements.
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2008-07-01
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