Harmonic Cmut Devices And Fabrication Methods

Loading...
Thumbnail Image
Author(s)
Advisor(s)
Editor(s)
Associated Organization(s)
Series
Series
Supplementary to:
Abstract
Harmonic capacitive micromachined ultrasonic transducer ("cMUT") devices and fabrication methods are provided. In a preferred embodiment, a harmonic cMUT device generally comprises a membrane having a non-uniform mass distribution. A mass load positioned along the membrane can be utilized to alter the mass distribution of the membrane. The mass load can be a part of the membrane and formed of the same material or a different material as the membrane. The mass load can be positioned to correspond with a vibration mode of the membrane, and also to adjust or shift a vibration mode of the membrane. The mass load can also be positioned at predetermined locations along the membrane to control the harmonic vibrations of the membrane. A cMUT can also comprise a cavity defined by the membrane, a first electrode proximate the membrane, and a second electrode proximate a substrate. Other embodiments are also claimed and described.
Sponsor
Date
3/19/2013
Extent
Resource Type
Text
Resource Subtype
Patent
Rights Statement
Rights URI