Variable frequency microwave processing of materials for microelectronic applications

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Author(s)
Tanikella, Ravindra V.
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School of Chemical and Biomolecular Engineering
School established in 1901 as the School of Chemical Engineering; in 2003, renamed School of Chemical and Biomolecular Engineering
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http://hdl.handle.net/1853/10271
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2003-05
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Dissertation
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