Title:
Variable frequency microwave processing of materials for microelectronic applications
Variable frequency microwave processing of materials for microelectronic applications
Author(s)
Tanikella, Ravindra V.
Advisor(s)
Kohl, Paul A.
Editor(s)
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Abstract
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Date Issued
2003-05
Extent
245 bytes
Resource Type
Text
Resource Subtype
Dissertation
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Access restricted to authorized Georgia Tech users only.