Energy-Filtered High-Resolution Electron Microscopy for Quantitative Solid State Structure Determination
Author(s)
Wang, Z. L. (Zhong Lin)
Van Heerden, D.
Josell, D.
Shapiro, A. J.
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Abstract
Energy-filtered (or selected) electron imaging is one of the future directions of highresolution electron microscopy (HREM). In
this paper, the characteristics and applications of energy-selected electron imaging at high-resolution for structure determinations are illustrated. It is shown that image contrast can be dramatically improved with the use of an energy filter. High-resolution chemical-sensitive imaging using ionization-loss electrons is demonstrated in studies of Ni/Ti and Al/Ti multilayer thin films.
It is also shown that the spatial resolution
of energy-selected ionization edge electron
images is dominated by the signal-to-noise
ratio. Experimental parameters which may
be selected to improve the signal-to-noise
ratio are discussed.
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Date
1997
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Text
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Article